WHF
We design and manufacture products based on customer’s specification. Edge clamping for non-contact on the front and back. Please contact us at any time.
- Fixed transfer
- No contact both on the front and back of the wafer
- Clean room compliant types available
- WHF series
This product is applicable to numerous areas of application that requires various different handling positions and directions, and which prevents misalignment caused by high-speed operation
This model makes contact with the edges of the workpiece only in order to solve the concern for pad scars caused by clamping and vacuum transfer.
Dual-Side (Synchronized) Driven Edge Clamp via Side Arm & Main Fork
Method of model
Specification
| Model | WHF-200AS | WHF-300AS | |
|---|---|---|---|
| Transfer Workpiece | Wafer | ||
| Workpiece Size | dia.200 | dia.300 | |
| Transfer Method | Edge Clamp | ||
| Transfer Quantity | １piece | ||
| Drive System | Closed | Spring (Clamp Method) | |
| Open | Vacuum Pressure -60KPa to 95KPa (Addition of Negative Pressure Cylinder) | ||
| Total Jaw Stroke | 10 ㎜ (Clamp 7㎜, Clamp Stock 3㎜) | ||
| Grip Force | 2.4N to 1.9N | ||
| Cleanliness | FED Standard Class 1 (Vacuum Required) | ||
| Fork Material | CFRP | ||
| Top, Temporary Holding Base, & Pad | PEEK | ||
| Weight | Approximately 1.2Kg | Approximately 1.7Kg | |
| Option | Open & Close Confirmation Sensor- | ||
