YAMATAKE Wet Process Sensors

• Sealed, Chemically Resistant Materials – 13mm circular sensor pancake lays on bottom of semiconductor wet process tool and detects liquid leak or spill by refraction light principle
• Inherently Safe – Optical light is used from a remotely mounted fiberoptic amplifier
• Sealed, chemically resistant materials – PFA housing and bracket with 316SS mounting gromme
• Quick Detection minimizing environmental impact and messy cleanup – typically, 1ml of liquid contact with the optical focal point will trigger the signal change. Sensitivity is adjustable to some extent by the amplifier used
• Fail Safe Design – Sensing light is conducted from amplifier emitter, reflected off pan, then returned to amplifier receiver. When liquid is present or cable breaks, amplifier changes state
• Floating Head Detection Capability – If the sensing head becomes unattached from the pan, the amplifier will change state. There is no reflective surface included in the head design

Download : HPF-D040 Specifications

• Fail Safe Design (Semi S2 Compliant)
• Chemically Resistant Materials
• Pipe Size 1/8″ to 1/2″ (3-13mm)
• Uses Multiple Beam Array – High Contrast Level
• Inherently Safe – Optical Light

Download : HPF-T032 Specifications

These fiber cables are used exclusively for liquid level detection in chemical baths, cleaning baths, and spin coaters/developers. The liquid surface is detected by contact of the sensor tip with the liquid surface.The proprietary tip structure prevents liquid buildup so stable detection is maintained. Their bend radius is less than all known competitors at 30 or 40mm and they have an operating temperature range of -30 to 105 degree C. Cable length is 2 meters.

Download : HPF-D033-D027 Specifications