High-Vacuum Pump Systems
VTU-080
- High-vacuum pump system combined with a turbo-molecular pump
- Clean exhaust and vacuum
- Compact
- Ease of operation
Features
Clean exhaust and vacuum
This model is a completely dry high-vacuum pump system combining a turbo-molecular pump and an oil-free scroll vacuum pump.
Compact
The unit is very compact, requiring little installation space. It can be installed in the vicinity of a device currently in use. Equipped with wheels, the unit is easy to move.
Ease of operation
The unit can be operated in two modes. The scroll vacuum pump and turbo-molecular pump are operated separately in manual mode, and the two pumps are started simultaneously at the touch of a button in auto mode*. One of these modes can be selected accordin
* In auto mode, the capacity of the unit, including the chamber and piping parts, is limited.
Options
Turbo-molecular pump
We build a high-vacuum pump system using the turbo-molecular pump specified by the customer.
For information about the orientation of the turbo-molecular pump, contact us.
Others
A chamber, vacuum gauge, automatic valve, etc. may be attached upon request.
Applications
- Accelerator
- Synchrotron radiation
- Leak test
- Mass analyzer
- Surface analyzer
- X-ray analyzer
- Electron microscope
- Test analyzer
- Auxiliary high-vacuum pump system
- Others
Safety precautions
This vacuum pumping system is suitable for clean processes only.
Do not use toxic, explosive, flammable or corrosive substances or substances which contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance work on pumps which have used special gases or other hazardous substances.
