WHA
We design and manufacture products based on customer’s specification. Edge clamping for non-contact on the front and back. Please contact us at any time.
- Fixed transfer
- No contact both on the front and back of the wafer
- Clean room compliant types available
- WHA series
This product is applicable to numerous areas of application that requires various different handling positions and directions, and which prevents misalignment caused by high-speed operation
This model makes contact with the edges of the workpiece only in order to solve the concern for pad scars caused by clamping and vacuum transfer.
Single-Side Driven Edge Clamp with Side Arm
Method of model
Specification
| Model | WHA-200AS | WHA-300AS | WHA-450AS | |
|---|---|---|---|---|
| Transfer Workpiece | Wafer | |||
| Workpiece Size | dia.200 | dia.300 | dia.450 | |
| Transfer Method | Edge Clamp | |||
| Transfer Quantity | 1piece | |||
| Drive System | Closed | Spring (Clamp Method) | ||
| Open | Vacuum Pressure -60KPa to 95KPa(Addition of Negative Pressure Cylinder) | |||
| Total Jaw Stroke | 10 ㎜ (Clamp 7㎜, Clamp Stock 3㎜) | |||
| Grip Force | 2.4N to 1.9N | Approximately 7N | ||
| Cleanliness | FED Standard Class 1 (Vacuum Required) | |||
| Fork Material | CFRP | |||
| Top, TemporaryHolding Base, & Pad | PEEK | |||
| Weight | Approximately0.4Kg | Approximately0.5Kg | Approximately1.7Kg | |
| Option | Open & Close Confirmation Sensor- | |||
