Clean Room
- Combined Slides (2-Axis)
- Flexible layout in a confined space
- Floor mount rail robot rystem for various types of application
- Workpiece transfer with precise loading and unloading
- Automatic transfer system inside Clean Room
- Multi-purpose part model with long working stroke and envelop
- SMIF applicable automation system
- Loading and unloading system for wafer
- Collect and distribute wafers inside cassete
- Automated stocker system
- PCB alignment device
Clean Room Type Orthogonal Robot
Features
- Stainless sealing and vacuum port for Clean Room requirements
- Combination use of mutiple slides or robots.
Specification
| Stroke | 200mm~1200mm |
|---|---|
| Rated Speed | ~1000mm/s |
| Rated Output | 100w~400w |
| Rated Driving Force | 90N~360N |
| Allowable Payload Limit | Horizontal (X) Axis: 15 to 50kg Vertical (Y) Axis: 5 to 19kg |
